Lurie Nanofabrication Facility University of Michigan

The Lurie NanoFabrication Facility (LNF) at the University of Michigan is a state-of- the-art shared facility with 13,500 sq. ft of clean room space and provides advanced micro- and nano-fabrication equipment and expertise to internal and external researchers. The LNF is a micro and nanofabrication facility.  The LNF’s primary fabrication technologies evolve from microchip fabrication.  These technologies have been tailored or modified to produce mechanical and optical devices in addition to electronics.

State-of-the-art Lurie NanoFabrication Facility for research on semiconductor materials and devices

The Lurie NanoFabrication Facility (LNF) at the University of Michigan is a state-of- the-art shared facility with 13,500 sq. ft of clean room space and provides advanced micro- and nano-fabrication equipment and expertise to internal and external researchers. The Lurie NanoFabrication Facility supports and enables cutting edge research, from semiconductor materials and devices, electronic circuits, solid-state lighting, energy, biotechnology, medical devices and unconventional materials and processing technologies.

The LNF offers a fertile ground for collaboration among student users, faculty groups, and non-academic researchers and plays a key role in supporting technology transfer and entrepreneurial activities. Technical staff members support the LNF facilities, programs and user community, and provide key expertise to help and advise researchers with their projects. For more information on the Lurie NanoFabrication Facility, visit: https://lnf.umich.edu/

Open to students, faculty, staff, researchers, and industry partners, the LNF offers a comprehensive set of tools to develop new micro and nanoscale devices, such as integrated circuits, nanophotonic and solid state devices, micro-electromechanical systems, and microfluidic systems. The Lurie NanoFabrication Facility also offers researchers the world’s most sophisticated instruments for fabrication and characterization of materials at the micro and nanoscales.

The LNF is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology.